Abstract:
A new process of femtosecond laser micromachining with ultrasonic vibration aided
devise is proposed. An ultrasonic aided device has been designed, and the laser
micromachining experiments of transparent materials have been carried out. The
effects of the ultrasonic vibration with different power on surface quality and the
drilling depth were investigated, and the mechanism of the ultrasonic vibration
aided laser machining analyzed. After introducing the ultrasonic vibration device,
the residue debris on surface of the ablated trench is significantly reduced, and the
drilling depth is increased. These results show that, ultrasonic vibration can
effectively improve the surface quality of material processing, increase the depth of
the drilling hole and promote the processing efficiency of the femtosecond laser.
